High sensitivity optomechanical reference accelerometer over 10 kHz
نویسندگان
چکیده
منابع مشابه
A high-resolution microchip optomechanical accelerometer
The monitoring of acceleration is essential for a variety of applications ranging from inertial navigation to consumer electronics1,2. Typical accelerometer operation involves the sensitive displacement measurement of a flexibly mounted test mass, which can be realized using capacitive3,4, piezoelectric5, tunnel-current6,7 or optical8–11 methods. Although optical detection provides superior dis...
متن کاملA microchip optomechanical accelerometer
The monitoring of accelerations is essential for a variety of applications ranging from inertial navigation to consumer electronics [1]. The basic operation principle of an accelerometer is to measure the displacement of a flexibly mounted test mass; sensitive displacement measurement can be realized using capacitive [2, 3], piezo-electric [4], tunnel-current [5], or optical [6–9] methods. Whil...
متن کاملA microchip optomechanical accelerometer – Supplementary Information
The oscillator susceptibility χ(ω) given in the main text follows from the differential equation of the harmonic oscillator: m ¨ x + mγ ˙ x + mω 2 m x = F appl. (S1) Transforming to Fourier space, this reads −ω 2 x + iωγx + ω 2 m x = F appl (ω) m. (S2) With F appl (ω)/m = a appl , this yields the accelerometer response x(ω) = χ(ω)a appl (ω) = 1 ω 2 m − ω 2 + i ωω m Q m a appl (ω). (S3) This fun...
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This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork (DETF) resonators, and the frequency output of two DETFs exhibits a differential shift. The dies of an SMRA are fabricated using silicon-on-insul...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2014
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4881936